Best PFA Inline Chemical Heater

Basic information

Best-in-class chemical heater

Inline Chemical Heater Performs Unmatched Semiconductor Process Fluid Heating

Now heat semiconductor process fluids up to 210°C!

Faster heatup: Single heater chamber sizes up to 18kW.

Rapid installation: Customized plumbing connections

Long heater life for reduced cost of ownership (COO):

Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.

Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.

Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.

Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.

Excellent temperature stability: Low watt density design enables accurate control of process temperature.

Applications Include:

SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)

Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:

Hydrochloric (HCl)

Hydrofluoric (HF)

Acetic (C2H4O2)

Nitric (HNO3)

Sulfuric (H2SO4)

Sulfuric acid and hydrogen peroxide

Sulfuric acid and ozone (O3)

Hydrofluoric acid and glycol (C2H6O2)

Potassium hydroxide (KOH)

Sodium hydroxide (NaOH)

Electroless nickel Electroless copper Electroless gold Deionized water

Some solvents (consult factory)

Service:

• Inline chemical heater with all fluoropolymer wetted

surfaces for virtually any wet chemistry application

Maximum Working Pressure:

• 100 PSIG (7 Bar) at 25oC

• 43 PSIG (. Bar) at 180oC

Heater Sizes: 1,000 watts up to 18,000 watts

Heater Voltages Available:

200 to 600 volts, single or three phase (12kW and

larger requires three phase).

Watt Density: 10 watts per square inch (1.5w/cm2)

Fluid Connections Available:

• 1⁄4” (6mm) to 1” (25mm) flared
• 1⁄2” (12mm) to 1” (25mm) Super 300 Type Pillar®•

Other connections available, consult factory

Third Party Certificatons: CE, UL, Semi S2 and S3

Element Purge:
• Small amount of clean dry air (CDA) or N2 gas flows

between the metal grounded element and the PTFE sheath

Applications

Semiconductor Wet Processes

Sterilization/Cleaning

Solar/Photovoltaic Wafer Cleaning

Safety Features

Liquid level sensor

Ground wire options

Over-temperature thermocouple

Process thermocouple

Options

Thermal cutoff

Thermocouples

Fiber-optic liquid level sensor

RTD sensors

Pressure relief valve